Virtual experimentation and test using predictive computer simulation is becoming an integral part of the design methodology for mechatronical microdevices and microsystems. The scope of this short course comprises an overview of today´s common modeling and simulation techniques and their application to selected demonstrators. Emphasis is laid on the physically consistent coupling of different energy domains (electro-mechanical, fluid-structure) on the device and on the system level. This includes the demonstration of reduced order modeling techniques such as generalized Kirchhoffian networks, compact and macromodeling, and their use for design optimization.
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Gerhard K. M. Wachutka (M’90) received the D.Sc. degree from the Ludwig-Maximilians-University, Munich, Germany, in 1985. From 1985 to 1988, he was with Siemens Corporate Research & Development, Munich, Germany, where he headed a modeling group active in the development of modern high-power semiconductor devices. In 1989, he joined the Fritz-Haber-Institute of the Max-Planck-Society, Berlin, Germany, where he worked in the field of theoretical solid-state physics. From 1990 to 1994, he was Head of the Microtransducers Modeling and Characterization Group, Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH), Zurich, where he also directed the Microtransducers Modeling Module of the Swiss Federal Priority Program (Micromechanics on Silicon in Switzerland). Since Spring 1994, he has been Head of the Institute for Physics of Electrotechnology, Munich University of Technology, Germany, where his research activities focus on the design, modeling, characterization, and diagnosis of the fabrication and operation of semiconductor microdevices and microsystems. He has authored or coauthored more than 180 publications in scientific or technical journals. Among his many educational activities, he bas set up and taught courses funded by European Community training programs such as UETP, EUROFORM, and EUROPRACTICE. Prof. Wachutka is a Member of the American Electrochemical Society, the American Materials Research Society, the ESD Association, the VDE Association for Electrical, Electronic and Information Technologies, the German Physical Society, the American Physical Society, and the AMA Society for Sensorics. |
Gabriele Schrag received her diploma in physics from the University of Stuttgart, Germany, in 1993 with a thesis on “Investigation of Precipitation in Czochralski silicon”. In 1995 she joined the Institute for Physics of Electrotechnology at the Munich University of Technology, working on modeling methods for electromechanical microdevices and microsystems, with emphasis on fluid-structure interaction and viscous damping effects. In 2002 she received her D.Sc. degree from the Munich University of Technology with a thesis on “Modeling of Coupled Effects in Microsystems on Device and System Level". Since 2003 she has been head of the MEMS group at the Institute for Physics of Electrotechnology, where her research activities are focussed on methodologies for the virtual prototyping of microdevices and microsystems, comprising predictive simulation and design optimization, parameter extraction and model verification.
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