| Technical Program Chairman |
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| Robert Puers |
Katholieke Universiteit Leuven, Belgium |
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| Regional Program Chairmen |
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| Paddy French |
Delft University of Technology, The Netherlands, Europe/Africa |
| Clark T. C. Nguyen |
University of California at Berkeley, USA, Americas |
| Makoto Ishida |
Toyohashi University of Technology, Japan, Asia/Oceania |
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| Topic Specialists |
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| Julian Gardner |
Warwick University, United Kingdom |
| Peter Hauptmann |
University of Magdeburg, Germany |
| Andreas Hierlemann |
ETH Zurich, Switzerland |
| Lina Sarro |
Delft University of Technology, The Netherlands |
| Uwe Schnakenberg |
Aachen University of Technology, Germany |
| Göran Stemme |
KTH, Royal Institute of Technology, Stockholm, Sweden |
| Harrie Tilmans |
IMEC, Leuven, Belgium |
| Albert Van den Berg |
University of Twente, The Netherlands |
| Claude Vauchier |
CEA-LETI, Grenoble, France |
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| Europe / Africa Program Committee |
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| Paddy French |
Delft University of Technology, The Netherlands, chairman |
| Albert van den Berg |
University of Twente, The Netherlands |
| Siebe Bouwstra |
MEMS TC, The Netherlands |
| Dominique Collard |
University of Lille, France |
| Joao Conde |
Instituto Superior Tecnico, Portugal |
| Paolo Dario |
Scuola Superiore Sant’Anna, Italy |
| Jaume Esteve |
Universitat Autonoma de Barcelona, Spain |
| Patrick Griss |
Zuehlke Engineering AG, Zürich, Switzerland |
| Yael Hanein |
Tel Aviv University, Israel |
| Christofer Hierold |
ETH, Zürich, Switzerland |
| Bernhard Jakoby |
University of Linz, Austria |
| Michael Kraft |
University of Southampton, U.K. |
| Walter Lang |
University of Bremen, Germany |
| Elfed Lewis |
University of Limerick, Ireland |
| Kofi Makinwa |
Delft University of Technology, The Netherlands |
| Ernst Obermeier |
Technical University of Berlin, Germany |
| Oliver Paul |
University of Freiburg, Germany |
| Philippe Renaud |
EPFL, Switzerland |
| Lina Sarro |
Delft University of Technology, The Netherlands |
| Göran Stemme |
Royal Institute of Technology, Sweden |
| Richard Syms |
Imperial College, U.K |
| Harrie Tilmans |
IMEC, Belgium |
| Claude Vauchier |
CEA-LETI, France |
| Michiel Vellekoop |
Vienna University of Technology, Austria, |
| Roland Zengerle |
University of Freiburg, Germany |
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| Americas Program Committee |
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| Clark T. C. Nguyen |
University of California at Berkeley, USA, Chairman |
| Chong Ahn |
University of Cincinnati, USA |
| Farrokh Ayazi |
Georgia Institute of Techology, USA |
| Karl Bohringer |
University of Washington, USA |
| Victor Bright |
University of Colorado, USA |
| Amy Duwel |
Draper Labs, USA |
| Gary Fedder |
Carnegie Mellon University, USA |
| Chuck Goldsmith |
MEMtronics, USA |
| Amy Herr |
Sandia National Labs, USA |
| Michael Huff |
MEMS Exchange, USA |
| Mike Judy |
Analog Devices, USA |
| Chang-Jin "CJ" Kim |
UCLA, USA |
| Roya Maboudian |
University of California at Berkeley, USA |
| Carlos Mastrangelo |
CWRU, USA |
| Mark Shannon |
University of Illinois, USA |
| Joe Simonson |
Sandia National Labs, USA |
| Olav Solgaard |
Stanford University, USA |
| Narayan Sundararajan |
Intel, USA |
| Ming C. Wu |
University of California at Berkeley, USA |
| Dan Youngner |
Honeywell, USA |
| Ted Zellers |
University of Michigan, USA |
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| Asia / Oceania Program Committee |
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| Makoto Ischida |
Toyohashi University of Technology, Japan, chairman |
| Shigeru Ando |
The University of Tokyo, Japan |
| Jong-Uk Bu |
SenPlus Inc., Korea |
| Kukjin Chun |
Seoul National University, Korea |
| Longsheng Fan |
National Tsinghua University, Taiwan |
| Weileun Fang |
National Tsinghua University, Taiwan |
| Kazuhiro Hane |
Tohoku University, Japan |
| Yi-long Hao |
Peking University, China |
| Shin-Won Kang |
Kyungpook National University, Korea |
| Nobu Kawahara |
DENSO, Japan |
| Yongkweon Kim |
Seoul National University, Korea |
| Ai Qun Liu |
Nanyang Technological University, Singapore |
| Yuji Miyahara |
National Institute for Material science, Japan |
| Takamichi Nakamoto |
Tokyo Institute of Technology, Japan |
| Takahito Ono |
Tohoku University, Japan |
| Je-Kyun Park |
KAIST, Korea |
| Kazuaki Sawada |
Toyohashi University of Technology, Japan |
| Mitsuhiro Shikida |
Nagoya University, Japan |
| Hiroaki Suzuki |
University of Tsukuba, Japan |
| Osamu Tabata |
Kyoto University, Japan |
| Hiroshi Toshiyoshi |
The University of Tokyo, Japan |
| Yuelin Wang |
Shanghai Institute of Microelectronics, China |
| Wojtek Wlodarski |
RMIT University, Australia |
| Man Wong |
Hong Kong University of Science & Technology, Hongkong |
| Shanhong Xia |
Chinese Academy of Sciences, China |
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